Conventional serial micromanipulators which have long open kinematic chains are not suitable for precise manipulation in microscopic scale because of their deficiencies of low stiffness and articulation error accumulation 传统串联机构形式的微操作机器人由于存在着固有的运动链长、刚性差、存在着误差累计等缺陷，操作精度非常有限，已不能适应mems技术发展的需要。
